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Electron energy loss and diffraction of backscattered electrons from silicon

Winkelmann, Aimo; Aizel, Koceila; Vos, Maarten


Electrons backscattered from crystals can show Kikuchi patterns: variations in intensity for different outgoing directions due to diffraction by the lattice. Here, we measure these effects as a function of their energy loss for 30 keV electrons backscattered from silicon. The change in diffraction contrast with energy loss depends strongly on the scattering geometry. At steep incidence on the sample, diffraction contrast in the observed Kikuchi bands decreases rapidly with energy loss. For an...[Show more]

CollectionsANU Research Publications
Date published: 2010
Type: Journal article
Source: New Journal of Physics
DOI: 10.1088/1367-2630/12/5/053001


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