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High voltage breakdown in an inductively coupled ion source

Aanesland, Ane; Boswell, Roderick; Smith, N.S.


An inductively coupled plasma source, designed for ion beam applications, is allowed to float up to several kilovolt positive. If one side of the radio frequency (rf) antenna is grounded and the dielectric source tube and the surrounding air are allowed to reach a threshold temperature corona breakdown at the rf antenna occurs. The experiments presented here show that a dc corona can be ignited with the presence of a dielectric barrier, which normally precludes dc breakdown. The formation of a...[Show more]

CollectionsANU Research Publications
Date published: 2006
Type: Journal article
Source: Journal of Physics D: Applied Physics
DOI: 10.1088/0022-3727/39/16/010


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