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Evaluation of the Bulk Lifetime of Silicon Wafers by Immersion in Hydrofluoric Acid and Illumination

Grant, Nicholas; McIntosh, Keith; Tan, Jason


We report on a procedure to temporarily attain a very high level of surface passivation for silicon wafers at room temperature. When applied during a photoconductance measurement, the procedure permits an accurate assessment of the bulk lifetime, even for

CollectionsANU Research Publications
Date published: 2012
Type: Journal article
Source: ECS Journal of Solid State Science and Technology
DOI: 10.1149/2.003202jss


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