Evaluation of the Bulk Lifetime of Silicon Wafers by Immersion in Hydrofluoric Acid and Illumination
We report on a procedure to temporarily attain a very high level of surface passivation for silicon wafers at room temperature. When applied during a photoconductance measurement, the procedure permits an accurate assessment of the bulk lifetime, even for
|Collections||ANU Research Publications|
|Source:||ECS Journal of Solid State Science and Technology|
|01_Grant_Evaluation_of_the_Bulk_2012.pdf||2.32 MB||Adobe PDF||Request a copy|
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