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FTIR analysis of microwave-excited PECVD silicon nitride layers

Cuevas, Andres; Chen, Florence; Tan, Jason; Mackel, Helmut; Winderbaum, Saul; Roth, Kristin


This paper presents infrared absorption (FTIR) measurements of SiN layers and correlates them to their ability to passivate silicon wafer surfaces. The best passivation was obtained for films having a nitrogen to silicon atomic composition in the proximity of N/Si=1.2, together with a high concentration of Si-N bonds (approximately 1×1023 cm-3) and a refractive index in the vicinity of n=2. The total hydrogen concentration in these films remained practically unchanged after a high temperature...[Show more]

CollectionsANU Research Publications
Date published: 2006
Type: Conference paper
Source: Proceedings of the World Conference on Photovoltaic Energy Conversion 2006
DOI: 10.1109/WCPEC.2006.279365


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