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Formation of ordered arrays of gold particles on silicon and silicon-dioxide by nanoindentation patterning

Ruffell, Simon; Venkatachalam, Dinesh; Shalav, Avi; Elliman, Robert

Description

Ordered arrays of gold particles have been fabricated on gold-coated Si(100) surfaces by pre-patterning the surface with a nanoindenter. During thermal annealing the Au is observed to accumulate within the residual indents. Once nucleated, the Au particles grow at the expense of smaller surface particles via an Ostwald-ripening process. The size of the Au particles is controlled by the initial thickness of the deposited Au layer, the size of the indentation (which is controlled with a high...[Show more]

CollectionsANU Research Publications
Date published: 2010
Type: Conference paper
URI: http://hdl.handle.net/1885/18412
Source: Materials Research Society Symposium Proceedings Volume 1228

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