Self-assembled Au nanoparticles in SiO 2 by ion implantation and wet oxidation
Implantation, annealing, and oxidation processes have been used to form Au nanoparticles with a narrow size and depth distribution in a SiO2 layer. Different approaches have been attempted: in particular, the gettering of Au to fill preformed nanocavities (obtained by H-implantation and annealing) and thus overcome the broad particle size distribution that is normally associated with nanoparticles formed by implantation and annealing. The results suggest that nanocavities cannot be directly...[Show more]
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|Source:||Journal of Applied Physics|
|01_Charnvanichborikarn_Self-assembled_Au_2009.pdf||431.63 kB||Adobe PDF||Request a copy|
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