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Self-assembled Au nanoparticles in SiO 2 by ion implantation and wet oxidation

Charnvanichborikarn, Supakit; Wong-Leung, Yin-Yin (Jennifer); Williams, James


Implantation, annealing, and oxidation processes have been used to form Au nanoparticles with a narrow size and depth distribution in a SiO2 layer. Different approaches have been attempted: in particular, the gettering of Au to fill preformed nanocavities (obtained by H-implantation and annealing) and thus overcome the broad particle size distribution that is normally associated with nanoparticles formed by implantation and annealing. The results suggest that nanocavities cannot be directly...[Show more]

CollectionsANU Research Publications
Date published: 2009
Type: Journal article
Source: Journal of Applied Physics
DOI: 10.1063/1.3262621


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