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Achieving a narrow size distribution of Au particles at a precise depth in SiO2 by segregation of Au precipitates

Charnvanichborikarn, Supakit; Conway, Martin; Wong-Leung, Yin-Yin (Jennifer); Williams, James


We propose a new method of confining Au nanoparticles of a narrow size distribution at a precise depth in an SiO2 matrix. The process involves the formation of nanocavities in silicon by hydrogen implantation and annealing (at 850 °C), followed by Au get

CollectionsANU Research Publications
Date published: 2009
Type: Journal article
Source: Nanotechnology
DOI: 10.1088/0957-4484/20/18/185603


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