The Implementation of Temperature Control to an Inductive-Coil Photoconductance Instrument for the Range of 0-2308C

Abstract

A new device setup for temperature and injection-dependent lifetime spectroscopy (TIDLS) is described. It comprises two off-the-shelf components: a heating and cooling stage (HCS) from INSTEC and an inductive-coil photoconductance (PC) instrument (WCT-100) from Sinton Consulting Inc. The HCS was fitted to the WCT-100 in a manner that circumscribes the inductive coil (the sensor) of the RF bridge circuit and controls the temperature of the wafer effectively. This setup has the advantage of requiring minor modifications to industry standard instruments while attaining a large temperature range. As experimental verification, injection-dependent lifetimes were measured over a temperature range, 0-230°C, in three iron-implanted silicon wafers. The measured lifetimes are consistent with the Shockley-Read-Hall equation using the impurity concentration calculated from the implant dose and the energy level and capture cross-sections of interstitial iron from the literature.