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Zirconium oxide surface passivation of crystalline silicon

Wan, Yimao; Bullock, James; Hettick, Mark; Xu, Zhaoran; Yan, Di; Peng, Jun; Javey, Ali; Cuevas, Andres


This letter reports effective passivation of crystalline silicon (c-Si) surfaces by thermal atomic layer deposited zirconium oxide (ZrOx). The optimum layer thickness and activation annealing conditions are determined to be 20 nm and 300 °C for 20 min. Cross-sectional transmission electron microscopy imaging shows an approximately 1.6 nm thick SiOx interfacial layer underneath an 18 nm ZrOx layer, consistent with ellipsometry measurements (∼20 nm). Capacitance-voltage measurements show that the...[Show more]

CollectionsANU Research Publications
Date published: 2018
Type: Journal article
Source: Applied Physics Letters
DOI: 10.1063/1.5032226
Access Rights: Open Access


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