Excimer laser processing of novel materials for optoelectronic and spintronic applications
Tabbal, Malek; Aziz, Michael; Madi, Charbel; Charnvanichborikarn, Supakit; Williams, James; Christidis, Theodore C.
The interaction of the highly energetic pulsed excimer laser beam with a target material induces non-equilibrium physico-chemical processes which could be harnessed to synthesize a variety of novel and technologically attractive materials that are difficult to grow using more conventional thin film deposition techniques. In this paper, recent advances on two excimer laser based techniques that we have used in the processing of thin films and surfaces will be presented. First, we demonstrate the...[Show more]
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|Source:||Proceedings of Photon Processing in Microelectronics and Photonics|
|01_Tabbal_Excimer_laser_processing_of_2007.pdf||1.03 MB||Adobe PDF||Request a copy|
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