Elastic Cross Sections for Electron Collisions with Molecules Relevant to Plasma Processing
Absolute electron-impact cross sections for molecular targets, including their radicals, are important in developing plasma reactors and testing various plasma processing gases. Low-energy electron collision data for these gases are sparse and only the limited cross section data are available. In this report, elastic cross sections for electron-polyatomic molecule collisions are compiled and reviewed for 17molecules relevant to plasma processing. Elastic cross sections are essential for the...[Show more]
|Collections||ANU Research Publications|
|Source:||Journal of Physical and Chemical Reference Data|
|01_Yoon_Elastic_Cross_Sections_for_2010.pdf||Published Version||1.13 MB||Adobe PDF|
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