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Elastic Cross Sections for Electron Collisions with Molecules Relevant to Plasma Processing

Yoon, J.-S.; Song, M.-Y.; Kato, H.; Hoshino, M.; Tanaka, H.; Brunger, M. J.; Buckman, S. J.; Cho, H.


Absolute electron-impact cross sections for molecular targets, including their radicals, are important in developing plasma reactors and testing various plasma processing gases. Low-energy electron collision data for these gases are sparse and only the limited cross section data are available. In this report, elastic cross sections for electron-polyatomic molecule collisions are compiled and reviewed for 17molecules relevant to plasma processing. Elastic cross sections are essential for the...[Show more]

CollectionsANU Research Publications
Date published: 2010-09-01
Type: Journal article
Source: Journal of Physical and Chemical Reference Data
DOI: 10.1063/1.3475647


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