Meige, Albert; Sutherland, Orson; Smith, Helen B.; Boswell, Rod W.
A one-dimensional model of a small plasma ion source (10cm long) is studied. A hybrid simulation where ions are treated as particles and electrons as a fluid obeying the Boltzmann relation is used to investigate ion heating in the plasma presheath. At low pressure (below a few mTorr), the ion velocity distribution is Maxwellian in the bulk and becomes a drifting Maxwellian distribution while transiting the presheath. The distribution remains essentially isotropic as the ions are accelerated...[Show more]
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