Takahashi, Kazunori; Charles, Christine; Boswell, Rod; Hatakeyama, Rikizo
Electron energy probability functions (EEPFs) are measured across the radius (0 ≤ r < 6.85 cm) of
a low pressure (0.3 mTorr) helicon plasma source terminated by a current-free double layer. The
source field of about 130 G is generated using a Helmholtz coil pair and the radio frequency (rt)
power is maintained at 250 W. All EEPFs exhibit a distribution with a temperature Te bulk out to a
break energy ebreak and a relatively depleted distribution for higher energies with a lower
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