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Radial characterization of the electron energy distribution in a helicon source terminated by a double layer

Takahashi, Kazunori; Charles, Christine; Boswell, Rod; Hatakeyama, Rikizo


Electron energy probability functions (EEPFs) are measured across the radius (0 ≤ r < 6.85 cm) of a low pressure (0.3 mTorr) helicon plasma source terminated by a current-free double layer. The source field of about 130 G is generated using a Helmholtz coil pair and the radio frequency (rt) power is maintained at 250 W. All EEPFs exhibit a distribution with a temperature Te bulk out to a break energy ebreak and a relatively depleted distribution for higher energies with a lower temperature...[Show more]

CollectionsANU Research Publications
Date published: 2008
Type: Journal article
Source: Physics of Plasmas
DOI: 10.1063/1.2959137


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