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Electronic properties and dopant pairing behavior of manganese in boron-doped silicon

Roth, T.; Rosenits, P.; Diez, S.; Glunz, S. W.; Macdonald, D.; Beljakowa, S.; Pensl, G.


Boron-doped silicon wafers implanted with low doses of manganese have been analyzed by means of deep-level transient spectroscopy(DLTS), injection-dependent lifetime spectroscopy, and temperature-dependent lifetime spectroscopy. While DLTSmeasurements allow the defect levels and majority carrier capture cross sections to be determined, the lifetime spectroscopy techniques allow analysis of the dominant recombination levels and the corresponding ratios of the capture cross sections....[Show more]

CollectionsANU Research Publications
Date published: 2007-11-28
Type: Journal article
Source: Journal of Applied Physics
DOI: 10.1063/1.2812698


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