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Investigation of binary compounds using electron Rutherford backscattering

Went, M. R.; Vos, M.


High-energy (40keV) electrons, scattering over large angles, transfer a small fraction of their kinetic energy to the target atoms, in the same way as ions do in Rutherford backscattering experiments. The authors show here that this energy transfer can be resolved and used to determine the mass of the scattering atom. In this way information on the surface composition for thicknesses of the order of 10nm can be obtained. The authors refer to this technique as “electron Rutherford...[Show more]

CollectionsANU Research Publications
Date published: 2007-02-13
Type: Journal article
Source: Applied Physics Letters
DOI: 10.1063/1.2535986


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