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Plasma ionization through wave-particle interaction in a capacitively coupled radio-frequency discharge

O’Connell, D.; Gans, T.; Vender, D.; Czarnetzki, U.; Boswell, R.


Phase resolved optical emission spectroscopy, with high temporal resolution, shows that wave-particle interactions play a fundamental role in sustaining capacitively coupled rf plasmas. The measurements are in excellent agreement with a simple particle-in-cell simulation. Excitation and ionization mechanisms are dominated by beam-like electrons, energized through the advancing and retreating electric fields of the rf sheath. The associated large-amplitude electronwaves, driven by a form of...[Show more]

CollectionsANU Research Publications
Date published: 2007-03-30
Type: Journal article
Source: Physics of Plasmas
DOI: 10.1063/1.2717889


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