Plasma ionization through wave-particle interaction in a capacitively coupled radio-frequency discharge
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O’Connell, D.; Gans, T.; Vender, D.; Czarnetzki, U.; Boswell, R.
Description
Phase resolved optical emission spectroscopy, with high temporal resolution, shows that wave-particle interactions play a fundamental role in sustaining capacitively coupled rf plasmas. The measurements are in excellent agreement with a simple particle-in-cell simulation. Excitation and ionization mechanisms are dominated by beam-like electrons, energized through the advancing and retreating electric fields of the rf sheath. The associated large-amplitude electronwaves, driven by a form of...[Show more]
Collections | ANU Research Publications |
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Date published: | 2007-03-30 |
Type: | Journal article |
URI: | http://hdl.handle.net/1885/16589 |
Source: | Physics of Plasmas |
DOI: | 10.1063/1.2717889 |
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01_O’Connell_Plasma_ionization_through_2007.pdf | Published Version | 531.68 kB | Adobe PDF | ![]() |
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