Plasma ionization through wave-particle interaction in a capacitively coupled radio-frequency discharge
Phase resolved optical emission spectroscopy, with high temporal resolution, shows that wave-particle interactions play a fundamental role in sustaining capacitively coupled rf plasmas. The measurements are in excellent agreement with a simple particle-in-cell simulation. Excitation and ionization mechanisms are dominated by beam-like electrons, energized through the advancing and retreating electric fields of the rf sheath. The associated large-amplitude electronwaves, driven by a form of...[Show more]
|Collections||ANU Research Publications|
|Source:||Physics of Plasmas|
|01_O’Connell_Plasma_ionization_through_2007.pdf||Published Version||531.68 kB||Adobe PDF|
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