Planarization of InP pyramids containing integrated InAs quantum dots and their optical properties
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Wang, Hao; Yuan, Jiayue; van Veldhoven, Rene P J; de Vries, Tjibbe; Smalbrugge, Barry; Geluk, Erik Jan; Nötzel, Richard
Description
Position-controlled InAs quantum dots(QDs) are integrated into planar InP structures by employing selective area growth of InP pyramids and regrowth by metalorganic vapor-phase epitaxy. A smooth surface morphology is obtained at elevated regrowth temperature due to suppression of three-dimensional growth on the pyramids. The height differences are less than 30 nm after nominal 700 nm InP regrowth at 640 °C. Most important, the integrated QDs maintain good optical quality after regrowth for the...[Show more]
dc.contributor.author | Wang, Hao | |
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dc.contributor.author | Yuan, Jiayue | |
dc.contributor.author | van Veldhoven, Rene P J | |
dc.contributor.author | de Vries, Tjibbe | |
dc.contributor.author | Smalbrugge, Barry | |
dc.contributor.author | Geluk, Erik Jan | |
dc.contributor.author | Nötzel, Richard | |
dc.date.accessioned | 2015-11-19T03:39:41Z | |
dc.date.available | 2015-11-19T03:39:41Z | |
dc.identifier.issn | 0021-8979 | |
dc.identifier.uri | http://hdl.handle.net/1885/16526 | |
dc.description.abstract | Position-controlled InAs quantum dots(QDs) are integrated into planar InP structures by employing selective area growth of InP pyramids and regrowth by metalorganic vapor-phase epitaxy. A smooth surface morphology is obtained at elevated regrowth temperature due to suppression of three-dimensional growth on the pyramids. The height differences are less than 30 nm after nominal 700 nm InP regrowth at 640 °C. Most important, the integrated QDs maintain good optical quality after regrowth for the realization of integrated nanophotonic devices and circuits operating at telecom wavelengths. | |
dc.publisher | American Institute of Physics (AIP) | |
dc.rights | http://www.sherpa.ac.uk/romeo/issn/0021-8979..."Publishers version/PDF may be used on author's personal website, institutional website or institutional repository" from SHERPA/RoMEO site (as at 19/11/15). Copyright 2010 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Journal of Applied Physics and may be found at https://doi.org/10.1063/1.3491025 | |
dc.source | Journal of Applied Physics | |
dc.title | Planarization of InP pyramids containing integrated InAs quantum dots and their optical properties | |
dc.type | Journal article | |
local.description.notes | Imported from ARIES. At the time of publication Hao Wang was affiliated with Department of Applied Physics, COBRA Research Institute, Eindhoven University of Technology, The Netherlands. | |
local.identifier.citationvolume | 108 | |
dc.date.issued | 2010-11-19 | |
local.identifier.absfor | 020499 | |
local.identifier.ariespublication | u4153526xPUB91 | |
local.publisher.url | https://www.aip.org/ | |
local.type.status | Published Version | |
local.contributor.affiliation | Wang, Hao, College of Physical and Mathematical Sciences, CPMS Research School of Physics and Engineering, Department of Electronic Materials Engineering, The Australian National University | |
local.contributor.affiliation | Yuan, Jiayue, Eindhoven University of Technology, Netherlands | |
local.contributor.affiliation | van Veldhoven, Rene P J, Eindhoven University of Technology, Netherlands | |
local.contributor.affiliation | de Vries, Tjibbe, Eindhoven University of Technology, Netherlands | |
local.contributor.affiliation | Smalbrugge, E, Eindhoven University of Technology, Netherlands | |
local.contributor.affiliation | Geluk, E-J, Eindhoven University of Technology, Netherlands | |
local.contributor.affiliation | Notzel, Richard, Eindhoven University of Technology, Netherlands | |
local.bibliographicCitation.issue | 10 | |
local.bibliographicCitation.startpage | 104308 | |
local.identifier.doi | 10.1063/1.3491025 | |
Collections | ANU Research Publications |
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