Unexpected short- and medium-range atomic structure of sputtered amorphous silicon upon thermal annealing
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Haberl, Bianca; Bogle, S. N.; Li, T.; McKerracher, I.; Ruffell, S.; Munroe, P.; Williams, J. S.; Abelson, J. R.; Bradby, J. E.
Description
We investigate the structure of magnetron-sputtered (MS) amorphous silicon(a-Si) prepared under standard deposition conditions and compare this to pure ion-implanted (II) a-Si. The structure of both films is characterized in their as-prepared and thermally annealed states. Significant differences are observed in short- and medium-range order following thermal annealing. Whereas II a-Si undergoes structural relaxation toward a continuous random network, MS a-Si exhibits little change....[Show more]
Collections | ANU Research Publications |
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Date published: | 2011-11-07 |
Type: | Journal article |
URI: | http://hdl.handle.net/1885/16485 |
Source: | Journal of Applied Physics |
DOI: | 10.1063/1.3658628 |
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