Skip navigation
Skip navigation

Unexpected short- and medium-range atomic structure of sputtered amorphous silicon upon thermal annealing

Haberl, Bianca; Bogle, S. N.; Li, T.; McKerracher, I.; Ruffell, S.; Munroe, P.; Williams, J. S.; Abelson, J. R.; Bradby, J. E.


We investigate the structure of magnetron-sputtered (MS) amorphous silicon(a-Si) prepared under standard deposition conditions and compare this to pure ion-implanted (II) a-Si. The structure of both films is characterized in their as-prepared and thermally annealed states. Significant differences are observed in short- and medium-range order following thermal annealing. Whereas II a-Si undergoes structural relaxation toward a continuous random network, MS a-Si exhibits little change....[Show more]

CollectionsANU Research Publications
Date published: 2011-11-07
Type: Journal article
Source: Journal of Applied Physics
DOI: 10.1063/1.3658628


File Description SizeFormat Image
01_Haberl_Unexpected_short-_and_2011.pdf875.64 kBAdobe PDFThumbnail

Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.

Updated:  19 May 2020/ Responsible Officer:  University Librarian/ Page Contact:  Library Systems & Web Coordinator