Nanoscale Structuring in Confined Geometries using Atomic Layer Deposition: Conformal Coating and Nanocavity Formation
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Ruff, Philip; Carrillo-Solano, Mercedes; Ulrich, Nils; Hadley, Andrea; Kluth, Patrick; Toimil-Molares, Maria Eugenia; Trautmann, Christina; Hess, Christian
Description
Nanoscale structuring in confined geometries using atomic layer deposition (ALD) is demonstrated for surfaces of nanochannels in track-etched polymer membranes and in mesoporous silica (SBA-15). Suitable process conditions for conformal ALD coating of polymer membranes and SBA-15 with inorganic oxides (SiO2, TiO2, Al2O3) were developed. On the basis of the oxide-coated layers, nanochannels were further structured by a molecular-templated ALD approach, where calixarene macromolecules are...[Show more]
dc.contributor.author | Ruff, Philip | |
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dc.contributor.author | Carrillo-Solano, Mercedes | |
dc.contributor.author | Ulrich, Nils | |
dc.contributor.author | Hadley, Andrea | |
dc.contributor.author | Kluth, Patrick | |
dc.contributor.author | Toimil-Molares, Maria Eugenia | |
dc.contributor.author | Trautmann, Christina | |
dc.contributor.author | Hess, Christian | |
dc.date.accessioned | 2019-07-03T01:52:53Z | |
dc.date.available | 2019-07-03T01:52:53Z | |
dc.identifier.issn | 0942-9352 | |
dc.identifier.uri | http://hdl.handle.net/1885/164327 | |
dc.description.abstract | Nanoscale structuring in confined geometries using atomic layer deposition (ALD) is demonstrated for surfaces of nanochannels in track-etched polymer membranes and in mesoporous silica (SBA-15). Suitable process conditions for conformal ALD coating of polymer membranes and SBA-15 with inorganic oxides (SiO2, TiO2, Al2O3) were developed. On the basis of the oxide-coated layers, nanochannels were further structured by a molecular-templated ALD approach, where calixarene macromolecules are covalently attached to the surface and then embedded into an Al2O3 layer. The removal of calixarene by ozone treatment results in 1–2 nm wide surface nanocavities. Surfaces exposed to different process steps are analyzed by small angle X-ray scattering (SAXS) as well as by X-ray photoelectron and infrared spectroscopy. The proposed nanostructuring process increases the overall surface area, allows controlling the hydrophilicity of the channel surface, and is of interest for studying water and ion transport in confinement. | |
dc.description.sponsorship | Financial support by the Deutsche Forschungsgemeinschaft (DFG-FOR1583) is gratefully acknowledged. Part of this research was undertaken on the SAXS/ WAXS beamline at the Australian Synchrotron. P.K. acknowledges the Australian Research Council for financial support from the Future Fellowship scheme (FT120100289). | |
dc.format.mimetype | application/pdf | |
dc.language.iso | en_AU | |
dc.publisher | Oldenbourg Wissenschaftsverlag | |
dc.rights | © 2018 | |
dc.source | Zeitschrift fur Physikalische Chemie | |
dc.title | Nanoscale Structuring in Confined Geometries using Atomic Layer Deposition: Conformal Coating and Nanocavity Formation | |
dc.type | Journal article | |
local.description.notes | Imported from ARIES | |
local.identifier.citationvolume | 232 | |
dc.date.issued | 2018-06-12 | |
local.identifier.absfor | 020406 - Surfaces and Structural Properties of Condensed Matter | |
local.identifier.ariespublication | a383154xPUB10180 | |
local.publisher.url | https://www.degruyter.com/page/556 | |
local.type.status | Published Version | |
local.contributor.affiliation | Ruff, Philip, Technische Universität Darmstadt | |
local.contributor.affiliation | Carrillo-Solano, Mercedes, Technische Universität Darmstadt | |
local.contributor.affiliation | Ulrich, Nils, GSI Helmholtzzentrum, Planckstr. | |
local.contributor.affiliation | Hadley, Andrea, College of Science, ANU | |
local.contributor.affiliation | Kluth, Patrick, College of Science, ANU | |
local.contributor.affiliation | Toimil-Molares, Maria Eugenia, GSI Helmholtz Centre for Heavy Ion Research | |
local.contributor.affiliation | Trautmann, Christina, Technische Universitat Darmstadt | |
local.contributor.affiliation | Hess, Christian, Technische Universität Darmstadt | |
dc.relation | http://purl.org/au-research/grants/arc/FT120100289 | |
local.bibliographicCitation.issue | 7-8 | |
local.bibliographicCitation.startpage | 1147 | |
local.bibliographicCitation.lastpage | 1171 | |
local.identifier.doi | 10.1515/zpch-2017-1058 | |
local.identifier.absseo | 970102 - Expanding Knowledge in the Physical Sciences | |
dc.date.updated | 2019-03-31T07:17:33Z | |
local.identifier.scopusID | 2-s2.0-85048779354 | |
dcterms.accessRights | Open Access | |
dc.provenance | http://sherpa.ac.uk/romeo/issn/0942-9352/..."Publisher's version/PDF may be used, on author's personal website, editor's personal website or institutional repository.12 months embargo" from SHERPA/RoMEO site (as at 3/07/19). | |
Collections | ANU Research Publications |
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