Takahashi, K.; Charles, C.; Boswell, R. W.; Kaneko, T.; Hatakeyama, R.
In the high potential plasma, upstream of the double layer, the measuredelectron energy distribution function(EEDF) shows a very clear change in slope at energies (εbreak) corresponding to the double layer potential drop. Electrons with lower energy are Maxwellian with a temperature of 8eV, whereas those with higher energy have a temperature of 5eV. The EEDF in the downstream plasma has a temperature of 5eV. Over the range of pressures wherein the double layer and accelerated ion beam are...[Show more]
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