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Double layer formation in the expanding region of an inductively coupled electronegative plasma

Plihon, N.; Corr, C. S.; Chabert, P.


Double-layers (DLs) were observed in the expanding region of an inductively coupled plasma with Ar–SF₆ gas mixtures. No DL was observed in pure argon or SF₆ fractions below a few percent. They exist over a wide range of power and pressure although they are only stable for a small window of electronegativity (typically between 8% and 13% of SF₆ at 1 mTorr), becoming unstable at higher electronegativity. They seem to be formed at the boundary between the source tube and the diffusion chamber and...[Show more]

CollectionsANU Research Publications
Date published: 2005-02-24
Type: Journal article
Source: Applied Physics Letters
DOI: 10.1063/1.1869533


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