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Temporal phenomena in inductively coupled chlorine and argon–chlorine discharges

Corr, C. S.; Steen, P. G.; Graham, W. G.


Reproducible modulations in low-pressure, inductively coupled discharges operating in chlorine and argon–chlorine mixtures have been observed and studied. Changes in the light output, floating potential, negative ion fraction, and charged particle densities were observed. Here we report two types of unstable operational modes in an inductively coupled discharge. On the one hand, when the discharge was matched, to minimize reflected power, instabilities were observed in argon–chlorine plasmas...[Show more]

CollectionsANU Research Publications
Date published: 2005-04-01
Type: Journal article
Source: Applied Physics Letters
DOI: 10.1063/1.1897060


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