Periodic formation and propagation of double layers in the expanding chamber of an inductive discharge operating in Ar/SF₆ mixtures
It has previously been shown [Tuszewski et al., Plasma Sources Sci. Technol.12, 396 (2003)] that inductive discharges in electronegative gases are subject to two types of instability: the sourceinstability related to the E to H transition and a transport instability, occurring downstream when an expanding chamber is present. These two types of instability are observed in our “helicon” reactor operated without a static magnetic field in low-pressure Ar∕SF6 mixtures. Temporally and spatially...[Show more]
|Collections||ANU Research Publications|
|Source:||Journal of Applied Physics|
|01_Plihon_Periodic_formation_and_2005.pdf||Published Version||239.31 kB||Adobe PDF|
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