Plihon, N.; Corr, C. S.; Chabert, P.; Raimbault, J.-L.
It has previously been shown [Tuszewski et al., Plasma Sources Sci. Technol.12, 396 (2003)] that inductive discharges in electronegative gases are subject to two types of instability: the sourceinstability related to the E to H transition and a transport instability, occurring downstream when an expanding chamber is present. These two types of instability are observed in our “helicon” reactor operated without a static magnetic field in low-pressure Ar∕SF6 mixtures. Temporally and spatially...[Show more]
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