Chabert, P.; Plihon, N.; Corr, C. S.; Raimbault, J.-L.; Lichtenberg, A. J.
Plihon et al. [J. Appl. Phys.98, 023306 (2005)] have recently shown that double layers usually form during the expansion of a low pressure electronegative plasma. These double layers act as permeable internal boundaries between the source (upstream) plasma and the downstream expanding plasma; positive ions flow from upstream to downstream whereas negative ions flow in the opposite direction. So far, the detailed physical mechanisms leading to their formation have not been identified. In this...[Show more]
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