Meige, Albert; Boswell, Rod W.
The electron energy distribution function(EEDF) in a low-pressure inductively coupled plasma confined between two infinite plates separated by 10cm is investigated using a one-dimensional particle-in-cell simulation including Monte Carlo collisions. At low pressure, where the electron mean free path is of the order of or greater than the system length, the EEDF is close to Maxwellian, except for its tail, depleted at high energy. We give clear evidence that this depletion is mostly due to the...[Show more]
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