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Determination of Mg composition in MgₓZn₁ˍₓO alloy: Validity of Vegard’s law

Ashrafi, A. B. M. Almamun; Segawa, Yusaburo

Description

Vegard’s law and inductively coupled plasma atomic emission spectrometry were employed to determine the Mg composition in MgₓZn₁ˍₓO layers deposited on 6H–SiC substrates. With the increase of Mg composition in MgₓZn₁ˍₓO layers, the c-axis length decreased by 5.2048−0.072x, while the a-axis length increased to 3.2491+0.047x. The lattice constants estimated by Vegard’s law and a theoretical model exhibited an uncertainty of ∼3% that has been attributed to the ∼2% lattice misfit in the MgO∕ZnO...[Show more]

CollectionsANU Research Publications
Date published: 2005-09-14
Type: Journal article
URI: http://hdl.handle.net/1885/16364
Source: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI: 10.1116/1.2050653

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