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Strain effects in ZnO layers deposited on 6H-SiC

Ashrafi, A. B. M. A.; Segawa, Y.; Shin, K.; Yao, T.


Correlation in crystallite sizes and defects of epitaxialZnO layers deposited on 6H-SiC substrates has been addressed. The biaxial strain governs the ZnO crystallites for the layer thickness of ∼400nm. The misfit dislocations were observed in nucleation and theater is the columnar growth mode diffracted in transmission electron microscopy. The columnar growth mode is a symbol of stacking faults that appear due to imbalanced interface chemistry in the II-VI/IV materials system, together with the...[Show more]

CollectionsANU Research Publications
Date published: 2006-09-27
Type: Journal article
Source: Journal of Applied Physics
DOI: 10.1063/1.2345021


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