Hickey, D. P.; Kuryliw, E.; Siebein, K.; Jones, K. S.; Chodelka, R.; Elliman, R.
Few transmission electron microscopy(TEM) studies of single crystaldiamond have been reported, most likely due to the time and difficulty involved in sample preparation. A method is described for creating a TEM cross section of single crystaldiamond using a focused ion beam and in situ lift-out. The method results in samples approximately 10μm long by 3μm deep with an average thickness of 100–300nm. The total time to prepare a cross-sectional TEM sample of diamond is less than 5h. The method...[Show more]
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