Cross-sectional transmission electron microscopy method and studies of implant damage in single crystal diamond
Few transmission electron microscopy(TEM) studies of single crystaldiamond have been reported, most likely due to the time and difficulty involved in sample preparation. A method is described for creating a TEM cross section of single crystaldiamond using a focused ion beam and in situ lift-out. The method results in samples approximately 10μm long by 3μm deep with an average thickness of 100–300nm. The total time to prepare a cross-sectional TEM sample of diamond is less than 5h. The method...[Show more]
|Collections||ANU Research Publications|
|Source:||Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films|
|01_Hickey_Cross-sectional_transmission_2006.pdf||636.8 kB||Adobe PDF|
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