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Cross-sectional transmission electron microscopy method and studies of implant damage in single crystal diamond

Hickey, D. P.; Kuryliw, E.; Siebein, K.; Jones, K. S.; Chodelka, R.; Elliman, R.


Few transmission electron microscopy(TEM) studies of single crystaldiamond have been reported, most likely due to the time and difficulty involved in sample preparation. A method is described for creating a TEM cross section of single crystaldiamond using a focused ion beam and in situ lift-out. The method results in samples approximately 10μm long by 3μm deep with an average thickness of 100–300nm. The total time to prepare a cross-sectional TEM sample of diamond is less than 5h. The method...[Show more]

CollectionsANU Research Publications
Date published: 2006-06-22
Type: Journal article
Source: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI: 10.1116/1.2209659


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