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Photoluminescence response of ion-implanted silicon

Harding, Ruth E.; Davies, Gordon; Hayama, S.; Coleman, P. G.; Burrows, C. P.; Wong-Leung, J.


The photoluminescence intensity from ion-implanted silicon can be quenched by the radiation damage implicit in the implantation.Annealing is then required before the intensity of the luminescence from a defect center is approximately proportional to the concentration of that center. Data from positron annihilation and photoluminescence experiments establish that severe quenching of the luminescence occurs when the mean separation of the small vacancy clusters is less than ∼30 atomic spacings,...[Show more]

CollectionsANU Research Publications
Date published: 2006-11-01
Type: Journal article
Source: Applied Physics Letters
DOI: 10.1063/1.2378402


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