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Effect of oxygen concentration on nanoindentation-induced phase transformations in ion-implanted amorphous silicon

Ruffell, S.; Vedi, J.; Bradby, J. E.; Williams, J. S.; Haberl, Bianca


The effect of the local oxygen concentration in ion-implanted amorphous Si (a-Si) on nanoindentation-inducedphase transformations has been investigated. Implantation of oxygen into the a-Sifilms has been used to controllably introduce an approximately constant concentration of oxygen, ranging from ∼10¹⁸ to ∼10²¹ cm⁻³, over the depth range of the phase transformed zones. Nanoindentation was performed under conditions that ensure a phase transformed zone composed completely of Si-III/XII in the...[Show more]

CollectionsANU Research Publications
Date published: 2009-04-21
Type: Journal article
Source: Journal of Applied Physics
DOI: 10.1063/1.3097752


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