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Implant isolation of ZnO

Kucheyev, S. O.; Jagadish, C.; Williams, J. S.; Deenapanray, P. N. K.; Yano, Mitsuaki; Koike, Kazuto; Sasa, Shigehiko; Inoue, Masataka; Ogata, Ken-ichi


We study ion-irradiation-induced electrical isolation in n-type single-crystal ZnO epilayers. Emphasis is given to improving the thermal stability of isolation and obtaining a better understanding of the isolation mechanism. Results show that an increase in the dose of 2 MeV ¹⁶Oions (up to ∼2 orders of magnitude above the threshold isolation dose) and irradiation temperature (up to 350 °C) has a relatively minor effect on the thermal stability of electrical isolation, which is limited to...[Show more]

CollectionsANU Research Publications
Date published: 2003-03-01
Type: Journal article
Source: Journal of Applied Physics
DOI: 10.1063/1.1542939


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