Cheylan, S.; Elliman, R. G.; Gaff, K.; Durandet, A.
An alternative method is investigated for the preparation of Si-rich SiO₂films used for the fabrication of light-emitting Si nanocrystalstructures. The technique, helicon-activated reactive evaporation (HARE), combines e-beam evaporation of silicon with plasma activation of a reactive argon–oxygen atmosphere, and has the advantage of being able to produce thick, H-free films suitable for planar photonic device applications. The nanocrystal-rich films were formed by annealing as-deposited films...[Show more]
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