Electrical isolation of GaN by MeV ion irradiation
The evolution of sheet resistance of n-type GaN epilayers exposed to irradiation with MeV H, Li, C, and O ions is studied in situ. Results show that the threshold dose necessary for complete isolation linearly depends on the original free electron concentration and reciprocally depends on the number of atomic displacements produced by ion irradiation. Furthermore, such isolation is stable to rapid thermal annealing at temperatures up to 900 °C. In addition to providing a better understanding of...[Show more]
|Collections||ANU Research Publications|
|Source:||Applied Physics Letters|
|01_Boudinov_Electrical_isolation_of_GaN_by_2001.pdf||355.92 kB||Adobe PDF|
Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.