Fu, L.; Tan, H. H.; Jagadish, C.; Li, Na; Li, Ning; Liu, Xingquan; Lu, Wei; Shen, S. C.
Single high-energy (0.9 MeV) proton implantation and rapid thermal annealing was used to tune the spectral response of the quantum-well infrared photodetectors (QWIPs). In addition to the large redshift of the QWIPs’ response wavelength after implantation, either narrowed or broadened spectrum was obtained at different interdiffusion extent. In general, the overall device performance for the low-dose implantation was not significantly degraded. In comparison with the other implantation schemes,...[Show more]
Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.