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Selectivity of nanocavities and dislocations for gettering of Cu and Fe in silicon

Stritzker, B.; Petravic, M.; Wong-Leung, J.; Williams, J. S.


The selectivity of interstitial-based extended defects (loops) and nanocavities for the gettering of Cu and Fe in Si has been studied. Controlled amounts of Cu and Fe were introduced by ion implantation into wafers containing pre-existing nanocavities and/or dislocations. Results show that Cu has a strong preference for gettering to open volume defects, even when high concentrations of interstitial-based loops are present in close proximity. However, the gettering of Fe in samples containing...[Show more]

CollectionsANU Research Publications
Date published: 2001-04-30
Type: Journal article
Source: Applied Physics Letters
DOI: 10.1063/1.1363689


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