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Iron detection in crystalline silicon by carrier lifetime measurements for arbitrary injection and doping

Macdonald, D. H.; Geerligs, Lambert Johan; Azzizi, A


An existing technique for accurate measurement of iron in silicon, which was previously restricted to low injection and a narrow doping range, has been extended to arbitrary injection and doping levels. This allows contactless lifetime measurement techniques to be used for very sensitive and rapid iron detection under a wide range of conditions. In addition, an easily measured and unambiguous “fingerprint” of iron in silicon has been identified. It is based on the invariant nature of the excess...[Show more]

CollectionsANU Research Publications
Date published: 2004-02-01
Type: Journal article
Source: Journal of Applied Physics
DOI: 10.1063/1.1637136


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