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Gettering of Pd to implantation-induced nanocavities in Si

Brett, D. A.; de M. Azevedo, G.; Llewellyn, D. J.; Ridgway, M. C.


The gettering of Pd to nanocavities in Si for implantation doses ranging from 5×10¹³ to 1×10¹⁵ cm¯² and annealing temperatures ranging from 750 to 1050 °C was investigated using Rutherford backscattering and cross-sectional transmission electron microscopy. For a given annealing temperature, the gettering efficiency increased as the dose decreased. For a given dose, maximum gettering efficiency was achieved at the intermediate temperatures studied. Competition between silicide formation and...[Show more]

CollectionsANU Research Publications
Date published: 2003-08-04
Type: Journal article
Source: Applied Physics Letters
DOI: 10.1063/1.1597424


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