Trapping of Pd, Au, and Cu by implantation-induced nanocavities and dislocations in Si
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Brett, D. A.; Llewellyn, D. J.; Ridgway, M. C.
Description
The gettering of metallic impurities by nanocavities formed in Si is a topic of both scientific importance and technological significance. Metallic precipitates observed in the regions where nanocavities were formed have been considered the result of the metal filling the nanocavities, either as elemental metal or a silicide phase. However, our transmission electron microscopy observations demonstrate that many of these precipitates are concentrated along dislocations, rather than randomly...[Show more]
dc.contributor.author | Brett, D. A. | |
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dc.contributor.author | Llewellyn, D. J. | |
dc.contributor.author | Ridgway, M. C. | |
dc.date.accessioned | 2015-10-06T03:47:51Z | |
dc.date.available | 2015-10-06T03:47:51Z | |
dc.identifier.issn | 0003-6951 | |
dc.identifier.uri | http://hdl.handle.net/1885/15776 | |
dc.description.abstract | The gettering of metallic impurities by nanocavities formed in Si is a topic of both scientific importance and technological significance. Metallic precipitates observed in the regions where nanocavities were formed have been considered the result of the metal filling the nanocavities, either as elemental metal or a silicide phase. However, our transmission electron microscopy observations demonstrate that many of these precipitates are concentrated along dislocations, rather than randomly distributed as expected for precipitates formed by the filling of nanocavities. Consequently, the gettering contribution of dislocations in the lattice caused by nanocavity formation must be considered. For Pd, dislocations are the preferred sites for the precipitation of the metal silicide. We compare results of gettering by nanocavities and dislocations for Pd, Au, and Cu to determine which structure is the dominant influence for the formation of precipitates of these metals and/or their silicides. | |
dc.publisher | American Institute of Physics | |
dc.rights | http://www.sherpa.ac.uk/romeo/issn/0003-6951..."Publishers version/PDF may be used on author's personal website, institutional website or institutional repository" from SHERPA/RoMEO site (as at 6/10/15). Copyright 2006 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Applied Physics Letters and may be found at https://doi.org/10.1063/1.2208382 | |
dc.source | Applied Physics Letters | |
dc.subject | Keywords: Copper; Gold; Ion implantation; Nanostructured materials; Palladium; Precipitation (chemical); Implantation; Nanocavities; Precipitates; Silicides; Silicon | |
dc.title | Trapping of Pd, Au, and Cu by implantation-induced nanocavities and dislocations in Si | |
dc.type | Journal article | |
local.description.notes | Imported from ARIES | |
local.description.refereed | Yes | |
local.identifier.citationvolume | 88 | |
dc.date.issued | 2006-05-31 | |
local.identifier.absfor | 020406 | |
local.identifier.ariespublication | MigratedxPub13238 | |
local.publisher.url | https://www.aip.org/ | |
local.type.status | Published Version | |
local.contributor.affiliation | Brett, David Alisdair, College of Physical and Mathematical Sciences, CPMS Research School of Physics and Engineering, Department of Electronic Materials Engineering, The Australian National University | |
local.contributor.affiliation | Llewellyn, David, College of Physical and Mathematical Sciences, CPMS Research School of Physics and Engineering, Department of Electronic Materials Engineering, The Australian National University | |
local.contributor.affiliation | Ridgway, Mark C, College of Physical and Mathematical Sciences, CPMS Research School of Physics and Engineering, Department of Electronic Materials Engineering, The Australian National University | |
local.bibliographicCitation.issue | 22 | |
local.bibliographicCitation.startpage | 222107 | |
local.identifier.doi | 10.1063/1.2208382 | |
dc.date.updated | 2015-12-12T07:50:43Z | |
local.identifier.scopusID | 2-s2.0-33744910064 | |
Collections | ANU Research Publications |
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01_Brett_Trapping_of_Pd,_Au,_and_Cu_by_2006.pdf | Published Version | 569.73 kB | Adobe PDF |
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