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Trapping of Pd, Au, and Cu by implantation-induced nanocavities and dislocations in Si

Brett, D. A.; Llewellyn, D. J.; Ridgway, M. C.


The gettering of metallic impurities by nanocavities formed in Si is a topic of both scientific importance and technological significance. Metallic precipitates observed in the regions where nanocavities were formed have been considered the result of the metal filling the nanocavities, either as elemental metal or a silicide phase. However, our transmission electron microscopy observations demonstrate that many of these precipitates are concentrated along dislocations, rather than randomly...[Show more]

CollectionsANU Research Publications
Date published: 2006-05-31
Type: Journal article
Source: Applied Physics Letters
DOI: 10.1063/1.2208382


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