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Dry-etch of As₂S₃ thin films for optical waveguide fabrication

Li, Weitang; Ruan, Yinlan; Luther-Davies, Barry; Rode, Andrei; Boswell, Rod

Description

Plasma etching to As₂S₃ thin films for optical waveguide fabrication has been studied using a helicon plasmaetcher. The etching effects using the processing gases or gas mixtures of O₂, Ar, and CF₄ were compared. It was found that the O₂plasma had no chemical etching effect to the As₂S₃, but it could oxidize the surface of the As₂S₃. The Ar plasma provided a strong ion sputtering effect to the films. The CF₄plasma exhibited a too strong chemical etch to the As₂S₃, leading to serious...[Show more]

CollectionsANU Research Publications
Date published: 2005-10-24
Type: Journal article
URI: http://hdl.handle.net/1885/15750
Source: Journal of Vacuum Science & Technology A
DOI: 10.1116/1.2049308

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