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Grounded radio-frequency electrodes in contact with high density plasmas

Aanesland, Ane; Charles, C.; Boswell, R. W.; Lieberman, M. A.

Description

An analytical model is developed of an asymmetric electrode system immersed in a plasma, consisting of two dc-grounded electrodes, where the smaller one is biased at 13.56MHz. The model is compared with a set of experiments performed in a high density low pressure plasma source (an electron cyclotron resonance source) where a second electrode is immersed into the plasma and powered by radio frequency. Excellent agreement is obtained between the analytical model and the experimental results. It...[Show more]

CollectionsANU Research Publications
Date published: 2005-10-17
Type: Journal article
URI: http://hdl.handle.net/1885/15749
Source: Physics of Plasmas
DOI: 10.1063/1.2089227

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