Grounded radio-frequency electrodes in contact with high density plasmas
An analytical model is developed of an asymmetric electrode system immersed in a plasma, consisting of two dc-grounded electrodes, where the smaller one is biased at 13.56MHz. The model is compared with a set of experiments performed in a high density low pressure plasma source (an electron cyclotron resonance source) where a second electrode is immersed into the plasma and powered by radio frequency. Excellent agreement is obtained between the analytical model and the experimental results. It...[Show more]
|Collections||ANU Research Publications|
|Source:||Physics of Plasmas|
|01_Aanesland_Grounded_radio-frequency_2005.pdf||546.32 kB||Adobe PDF|
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