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Mechanical properties of ZnO epitaxial layers grown on a- and c-axis sapphire

Coleman, Victoria A; Bradby, J. E.; Jagadish, C.; Munroe, P.; Heo, Y. W.; Pearton, S. J.; Norton, D P; Inoue, M.; Yano, M.


The mechanical properties of zinc oxide epitaxial layers grown on a- and c-axis sapphire have been studied by spherical nanoindentation and cross-sectional transmission electron microscopy. As-grown threading dislocations, which are characteristic of epitaxialmaterial, combined with the presence of the much harder, underlying substrate are found to have a significant effect on the mechanical behavior of ZnO epilayers as compared to bulk material. Epilayer material is found to be significantly...[Show more]

CollectionsANU Research Publications
Date published: 2005-05-11
Type: Journal article
Source: Applied Physics Letters
DOI: 10.1063/1.1929874


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