High source potential upstream of a current-free electric double layer
Large plasma potentials (up to ∼80V) are measured upstream of a current-free electric double layer generated in a helicon rf argon discharge for a constant rf power of 250 W (at 13.56 MHz) and for low operating pressures(<2mTorr) using an electrostatic ion energy analyzer. The energy of the Ar⁺ion beam formed by acceleration through the potential drop of the double layer is found to be strongly correlated with the large source potentials: both the source potential and the beam energy increase...[Show more]
|Collections||ANU Research Publications|
|Source:||Physics of Plasmas|
|01_Charles_High_source_potential_upstream_2005.pdf||Published Version||61.33 kB||Adobe PDF|
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