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High source potential upstream of a current-free electric double layer

Charles, Christine


Large plasma potentials (up to ∼80V) are measured upstream of a current-free electric double layer generated in a helicon rf argon discharge for a constant rf power of 250 W (at 13.56 MHz) and for low operating pressures(<2mTorr) using an electrostatic ion energy analyzer. The energy of the Ar⁺ion beam formed by acceleration through the potential drop of the double layer is found to be strongly correlated with the large source potentials: both the source potential and the beam energy increase...[Show more]

CollectionsANU Research Publications
Date published: 2005-04-01
Type: Journal article
Source: Physics of Plasmas
DOI: 10.1063/1.1883182


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