Meige, Albert; Jarnyk, Mark; Kwok, Dixon T. K.; Boswell, Rod W.
A one-dimensional Monte Carlo collision–particle-in-cell plasma computer code was used to simulate plasma immersion ion implantation by applying a negative voltage pulse to the substrate while the reactor wall is grounded. The results presented here show the effect of short rise time pulses: for rise times shorter than the electron plasma period (typically 5ns∕kV), an electron shock wave is observed where a rapidly expanding sheath heats the electrons up to high energies. Many of these fast...[Show more]
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