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Particle-in-cell simulation of an electron shock wave in a rapid rise time plasma immersion ion implantation process

Meige, Albert; Jarnyk, Mark; Kwok, Dixon T. K.; Boswell, Rod W.


A one-dimensional Monte Carlo collision–particle-in-cell plasma computer code was used to simulate plasma immersion ion implantation by applying a negative voltage pulse to the substrate while the reactor wall is grounded. The results presented here show the effect of short rise time pulses: for rise times shorter than the electron plasma period (typically 5ns∕kV), an electron shock wave is observed where a rapidly expanding sheath heats the electrons up to high energies. Many of these fast...[Show more]

CollectionsANU Research Publications
Date published: 2005-03-25
Type: Journal article
Source: Physics of Plasmas
DOI: 10.1063/1.1872894


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