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Patterned growth of carbon nanotubes on Si substrates without predeposition of metal catalysts

Chen, Y.; Yu, J.


Aligned carbon nanotubes(CNTs) can be readily synthesized on quartz or silicon-oxide-coated Si substrates using a chemical vapor deposition method, but it is difficult to grow them on pure Si substrates without predeposition of metal catalysts. We report that aligned CNTs were grown by pyrolysis of iron phthalocyanine at 1000°C on the templates created on Si substrates with simple mechanical scratching. Scanning electron microscopy and x-ray energy spectroscopy analysis revealed that the...[Show more]

CollectionsANU Research Publications
Date published: 2005-07-11
Type: Journal article
Source: Applied Physics Letters
DOI: 10.1063/1.1995961


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