Acceptor-like deep level defects in ion-implanted ZnO
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Vines, L.; Wong-Leung, Jennifer; Jagadish, C.; Quemener, V.; Monakhov, E. V.; Svensson, B. G.
Description
N-type ZnO samples have been implanted with MeV Zn⁺ ions at room temperature to doses between 1×10⁸ and 2×10¹⁰cm⁻², and the defect evolution has been studied by capacitance-voltage and deep level transient spectroscopy measurements. The results show a dose dependent compensation by acceptor-like defects along the implantation depth profile, and at least four ion-induced deep-level defects arise, where two levels with energy positions of 1.06 and 1.2 eV below the conduction band increase...[Show more]
Collections | ANU Research Publications |
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Date published: | 2012-05-22 |
Type: | Journal article |
URI: | http://hdl.handle.net/1885/15696 |
Source: | Applied Physics Letters |
DOI: | 10.1063/1.4720514 |
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01_Vines_Acceptor-like_deep_level_2012.pdf | Published Version | 1 MB | Adobe PDF |
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