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Thermal pretreatment of sapphire substrates prior to ZnO buffer layer growth

Huang, Shimin; Gu, Shulin; Zhu, Shunming; Gu, Ran; Tang, Kun; Ye, Jiandong; Zhang, Rong; Shi, Yi; Zheng, Youdou


The properties of ZnO buffer layers grown via metal-organic chemical vapor deposition (MOCVD) on sapphire substrates after various thermal pretreatments are systematically investigated. High-temperature pretreatments lead to significant modifications of the sapphire surface, which result in enhanced growth nucleation and a consequent improvement of the surface morphology and quality of the ZnO layers. The evolution of the surface morphology as seen by atomic force microscopy indicates an...[Show more]

CollectionsANU Research Publications
Date published: 2013-08-12
Type: Journal article
Source: Journal of Vacuum Science & Technology B
DOI: 10.1116/1.4817825


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