Thermal pretreatment of sapphire substrates prior to ZnO buffer layer growth
The properties of ZnO buffer layers grown via metal-organic chemical vapor deposition (MOCVD) on sapphire substrates after various thermal pretreatments are systematically investigated. High-temperature pretreatments lead to significant modifications of the sapphire surface, which result in enhanced growth nucleation and a consequent improvement of the surface morphology and quality of the ZnO layers. The evolution of the surface morphology as seen by atomic force microscopy indicates an...[Show more]
|Collections||ANU Research Publications|
|Source:||Journal of Vacuum Science & Technology B|
|01_Huang_Thermal_pretreatment_of_2013.pdf||Published Version||1.75 MB||Adobe PDF|
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