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Simulation of main plasma parameters of a cylindrical asymmetric capacitively coupled plasma micro-thruster using computational fluid dynamics

Greig, Amelia; Charles, Christine; Boswell, Roderick W.

Description

Computational fluid dynamics (CFD) simulations of a radio-frequency (13.56 MHz) electrothermal capacitively coupled plasma (CCP) micro-thruster have been performed using the commercial CFD-ACE+ package. Standard operating conditions of a 10W, 1.5 Torr argon discharge were used to compare with previously obtained experimental results for validation. Results show that the driving force behind plasma production within the thruster is ion-induced secondary electrons ejected from the surface of...[Show more]

CollectionsANU Research Publications
Date published: 2015-01-06
Type: Journal article
URI: http://hdl.handle.net/1885/15663
Source: Frontiers in Physics
DOI: 10.3389/fphy.2014.00080

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