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Carrier de-smearing of photoluminescence images on silicon wafers using the continuity equation

Phang, S. P.; Sio, H. C.; Macdonald, D.


Photoluminescence images of silicon wafers with non-uniform lifetime distribution are often smeared by lateral carrier diffusion. We propose a simple method to de-smear the photoluminescence images by applying the two-dimensional continuity equation. We demonstrate the method on simulated silicon wafers and measured photoluminescence-based lifetime image of multicrystalline silicon wafer. The de-smearing is very effective in recovering the actual lifetime for wafers with gradual changes in...[Show more]

CollectionsANU Research Publications
Date published: 2013-11-07
Type: Journal article
Source: Applied Physics Letters
DOI: 10.1063/1.4829658


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