Carrier de-smearing of photoluminescence images on silicon wafers using the continuity equation
Photoluminescence images of silicon wafers with non-uniform lifetime distribution are often smeared by lateral carrier diffusion. We propose a simple method to de-smear the photoluminescence images by applying the two-dimensional continuity equation. We demonstrate the method on simulated silicon wafers and measured photoluminescence-based lifetime image of multicrystalline silicon wafer. The de-smearing is very effective in recovering the actual lifetime for wafers with gradual changes in...[Show more]
|Collections||ANU Research Publications|
|Source:||Applied Physics Letters|
|01_Phang_Carrier_de-smearing_of_2013.pdf||Published Version||1.48 MB||Adobe PDF|
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