Phang, S. P.; Sio, H. C.; Macdonald, D.
Photoluminescence images of silicon wafers with non-uniform lifetime distribution are often smeared by lateral carrier diffusion. We propose a simple method to de-smear the photoluminescence images by applying the two-dimensional continuity equation. We demonstrate the method on simulated silicon wafers and measured photoluminescence-based lifetime image of multicrystalline silicon wafer. The de-smearing is very effective in recovering the actual lifetime for wafers with gradual changes in...[Show more]
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