Little, D. J.; Kuruwita, R. L.; Joyce, A.; Gao, Q.; Burgess, T.; Jagadish, C.; Kane, D. M.
Phase stepping interferometry is used to measure the size of near-cylindrical nanowires. Nanowires with nominal radii of 25 nm and 50 nm were used to test this by comparing specific measured optical phase profile values with theoretical values calculated using a wave-optic model of the Phase stepping interferometry (PSI) system. Agreement within 10% was found, which enabled nanowire radii to be predicted within 4% of the nominal value. This demonstration highlights the potential capability for...[Show more]
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